By (author): M. Meyyappan
Description
This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation - so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.
Table Of Contents
A Review of Numerical Methods. Crystal Growth. Chemical Vapor Deposition Processes. Plasma Process Modeling. Rapid Thermal Processing.